Publications
2024
- Yoshioka, Valerie, Jin, Jicheng, Zhou, Haiqi, Tang, Zichen, Olsson III, Roy H. and Zhen, Bo. "CMOS-compatible, AlScN-based integrated electro-optic phase shifter" Nanophotonics, vol. 13, no. 18, 2024, pp. 3327-3335.
- S. Acosta et al., "Strain-Modulated Multiferroic Magnetic Field Sensor for Operation up to 500 °C," in IEEE Sensors Letters, vol. 8, no. 10, pp. 1-4, Oct. 2024
- Izhar et al., "A High Quality Factor, 19-GHz Periodically Poled AlScN BAW Resonator Fabricated in a Commercial XBAW Process," in IEEE Transactions on Electron Devices, vol. 71, no. 9, pp. 5630-5637, Sept. 2024.
- X. Du, N. Sharma, Z. Tang, C. Leblanc, D. Jariwala and R. H. Olsson, "Near 6-GHz Sezawa Mode Surface Acoustic Wave Resonators Using AlScN on SiC," in Journal of Microelectromechanical Systems.
- P. Gharavi, R. H. Olsson, and E. Stach, “Interfacial Origins of Electrical Breakdown Strength Enhancement in AlScN through Multilayer Structure,” Microscopy and Microanalysis, vol. 30, no. Supplement_1, Jul. 2024.
- S. Singh et al., “Nonvolatile Control of Valley Polarized Emission in 2D WSe2-AlScN Heterostructures,” ACS Nano, vol. 18, no. 27, pp. 17958–17968, Jul. 2024.
- Xu, Jun, et al. "Chemically Driven Sintering of Colloidal Cu Nanocrystals for Multiscale Electronic and Optical Devices." ACS nano 18.27 (2024).
- K.-H. Kim et al., “Multistate, Ultrathin, Back-End-of-Line-Compatible AlScN Ferroelectric Diodes,” ACS Nano, vol. 18, no. 24, pp. 15925–15934, Jun. 2024.
- Pradhan, D.K., Moore, D.C., Kim, G. et al. A scalable ferroelectric non-volatile memory operating at 600 °C. Nat Electron 7, 348–355 (2024)
- Pradhan, Dhiren K., et al. "Materials for High Temperature Digital Electronics." arXiv preprint arXiv:2404.03510 (2024).
- K.-H. Kim et al., “Tuning Polarity in WSe2/AlScN FeFETs via Contact Engineering,” ACS Nano, vol. 18, no. 5, pp. 4180–4188, Feb. 2024.
- X. Du et al., "Meander Line Transducer Empowered Low-Loss Tunable Magnetostatic Wave Filters with Zero Static Power Consumption," 2024 IEEE/MTT-S International Microwave Symposium - IMS 2024, Washington, DC, USA, 2024, pp. 42-45.
- Z. Tang et al., "A Comprehensive Approach for Total Suppression of In-Band Spurious Modes in UHF Al0.72Sc0.28N Lamb Wave Resonators and Filters," in Journal of Microelectromechanical Systems, vol. 33, no. 4, pp. 456-467, Aug. 2024.
- Fiagbenu, M. M. A., et al. "Periodically Poled Aluminum Scandium Nitride Bulk Acoustic Wave Resonators and Filters for Communications in the 6G Era." arXiv preprint arXiv:2406.15431 (2024).
- Du, X., Idjadi, M.H., Ding, Y. et al. Frequency tunable magnetostatic wave filters with zero static power magnetic biasing circuitry. Nat Commun 15, 3582 (2024).
- L. Hackett et al., “S-band acoustoelectric amplifier in an InGaAs-AlScN-SiC architecture,” Applied Physics Letters, vol. 124, no. 11, p. 113503, Mar. 2024.
- X. Du et al., "Magnetostatic Wave Notch Filters Frequency Tuned Via a Zero DC Power Magnetic Bias Circuit," 2024 IEEE International Microwave Filter Workshop (IMFW), Cocoa Beach, FL, USA, 2024, pp. 176-179
- Erdil, Mertcan, et al. "Wideband, Efficient AlScN-Si Acousto-Optic Modulator in a Commercially Available Silicon Photonics Process." arXiv preprint arXiv:2402.01127 (2024).
- Izhar, Y. Deng, M. M. A. Fiagbenu, A. Kochhar, R. Vetury and R. H. Olsson, "Highly Tunable Piezoelectric Resonators Using Al0.7Sc0.3N," in Journal of Microelectromechanical Systems, vol. 33, no. 2, pp. 121-123, April 2024
2023
- T. Mion et al., “High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer,” Sensors, vol. 23, no. 20, Art. no. 20, Jan. 2023.
- Y. Huo, S. Sofronici, M. J. D’Agati and R. H. Olsson, "Low Power Circuit Interfaces for Strain Modulated Multiferroic Biomagnetic Sensors," in IEEE Open Journal of the Solid-State Circuits Society, vol. 3, pp. 214-222, 2023.
- Z. Tang, G. Esteves, and R. H. Olsson III, “Sub-quarter micrometer periodically poled Al0.68Sc0.32N for ultra-wideband photonics and acoustic devices,” Journal of Applied Physics, vol. 134, no. 11, p. 114101, Sep. 2023.
- Y. He et al., “Metal-ferroelectric AlScN-semiconductor memory devices on SiC wafers,” Applied Physics Letters, vol. 123, no. 12, p. 122901, Sep. 2023.
- A.-M. Zaccarin, G. M. Iyer, R. H. Olsson and K. T. Turner, "Fabrication and Characterization of Soil Moisture Sensors on a Biodegradable, Cellulose-Based Substrate," in IEEE Sensors Journal,2023.
- L. Hackett et al., “Aluminum scandium nitride films for piezoelectric transduction into silicon at gigahertz frequencies,” Applied Physics Letters, vol. 123, no. 7, p. 073502, Aug. 2023.
- A.-M. Zaccarin, G. M. Iyer, A. Kochhar, R. Vetury, K. T. Turner and R. H. Olsson, "High Performance Lamb Wave Resonator Operating in the 900 MHz ISM Band for Wireless Sensing Applications," 2023 IEEE/MTT-S International Microwave Symposium - IMS 2023, San Diego, CA, USA, 2023, pp. 1168-1171
- Izhar et al., "A K-Band Bulk Acoustic Wave Resonator Using Periodically Poled Al0.72Sc0.28N," in IEEE Electron Device Letters, vol. 44, no. 7, pp. 1196-1199, July 2023.
- J. X. Zheng et al., “Ferroelectric behavior of sputter deposited Al0.72Sc0.28N approaching 5 nm thickness,” Applied Physics Letters, vol. 122, no. 22, p. 222901, Jun. 2023.
- Y. Huo, S. Sofronici, et al., "Low Noise, Strain Modulated, Multiferroic Magnetic Field Sensor Systems," in IEEE Sensors Journal, vol. 23, no. 13, pp. 14025-14040, 1 July1, 2023.
- K.-H. Kim et al., “Scalable CMOS back-end-of-line-compatible AlScN/two-dimensional channel ferroelectric field-effect transistors,” Nature Nanotechnology, vol. 18, no. 9, 2023.
2022
R. Beaucejour, M. D’Agati, K. Kalyan, and R. H. Olsson III, "Compensation of the Stress Gradient in Physical Vapor Deposited Al1− xScxN Films for Microelectromechanical Systems with Low Out-of-Plane Bending," Micromachines, vol. 13, no. 8, p. 1169, 2022.
R. Beaucejour, V. Roebisch, A. Kochhar, C. G. Moe, M. D. Hodge, and R. H. Olsson, "Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon," Journal of Microelectromechanical Systems, 2022.
M. D’Agati et al., "High-Q Factor Multiferroic Resonant MEMS Low Frequency Magnetic Field Sensors," in 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2022: IEEE, pp. 1-3.
X. Du, Z. Tang, C. Leblanc, D. Jariwala, and R. H. Olsson, "High-Performance SAW Resonators at 3 GHz Using AlScN on a 4H-SiC Substrate," in 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2022: IEEE, pp. 1-2.
K.-H. Kim et al., "Scalable CMOS-BEOL compatible AlScN/2D Channel FE-FETs," arXiv preprint arXiv:2201.02153, 2022.
X. Liu et al., "Reconfigurable Compute-In-Memory on Field-Programmable Ferroelectric Diodes," arXiv preprint arXiv:2202.05259, 2022.
P. Musavigharavi, R. Beaucejour, R. H. Olsson, and E. A. Stach, "Strain-Engineering of Aluminum Scandium Nitride Films Grown Directly on Silicon by Utilizing a Gradient Seed Layer: Application of 4D-STEM Technique," Microscopy and Microanalysis, vol. 28, no. S1, pp. 444-445, 2022.
Z. Tang, G. Esteves, J. Zheng, and R. H. Olsson, "Vertical and Lateral Etch Survey of Ferroelectric AlN/Al1− xScxN in Aqueous KOH Solutions," Micromachines, vol. 13, no. 7, p. 1066, 2022.
V. Yoshioka, J. Lu, Z. Tang, J. Jin, R. Olsson III, and B. Zhen, "EnhancedΧ (2) in CMOS-compatible Al 1-x Sc x N thin films," Bulletin of the American Physical Society, 2022.
2021
J. X. Zheng et al., "Electrical breakdown strength enhancement in aluminum scandium nitride through a compositionally modulated periodic multilayer structure," Journal of Applied Physics, vol. 130, no. 14, p. 144101, 2021.
V. Yoshioka, J. Lu, Z. Tang, J. Jin, R. H. OlssonIII, and B. Zhen, "Strongly enhanced second-order optical nonlinearity in CMOS-compatible Al1−xScxN thin films," APL Materials, vol. 9, no. 10, p. 101104, 2021.
P. Musavigharavi et al., "Strain Engineering in Aluminum Scandium Nitride Thin Film using Four-dimensional Scanning Transmission Electron Microscopy (4D-STEM) Technique," Microscopy and Microanalysis, vol. 27, no. S1, pp. 2204-2205, 2021.
P. Musavigharavi et al., "Nanoscale Structural and Chemical Properties of Ferroelectric Aluminum Scandium Nitride Thin Films," The Journal of Physical Chemistry C, vol. 125, no. 26, pp. 14394-14400, 2021/07/08 2021.
X. Liu et al., "Aluminum scandium nitride-based metal–ferroelectric–metal diode memory devices with high on/off ratios," Applied Physics Letters, vol. 118, no. 20, p. 202901, 2021/05/17 2021.
D. Wang et al., "Sub-Microsecond Polarization Switching in (Al,Sc)N Ferroelectric Capacitors Grown on Complementary Metal–Oxide–Semiconductor-Compatible Aluminum Electrodes," physica status solidi (RRL) – Rapid Research Letters, vol. 15, no. 5, p. 2000575, 2021.
G. Esteves et al., "Al0.68Sc0.32N Lamb wave resonators with electromechanical coupling coefficients near 10.28%," Applied Physics Letters, vol. 118, no. 17, p. 171902, 2021.
X. Liu et al., "Post-CMOS Compatible Aluminum Scandium Nitride/2D Channel Ferroelectric Field-Effect-Transistor Memory," Nano Letters, vol. 21, no. 9, pp. 3753-3761, 2021/05/12 2021.
Y. Song et al., "Thermal Conductivity of Aluminum Scandium Nitride for 5G Mobile Applications and Beyond," ACS Applied Materials & Interfaces, vol. 13, no. 16, pp. 19031-19041, 2021/04/28 2021.
C. R. Kagan, D. P. Arnold, M. G. Allen, and R. H. Olsson, "IoT4Ag: MEMS-Enabled Distributed Sensing, Communications, And Information Systems for The Internet Of Things For Precision Agriculture," in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 2021, pp. 350-353.
2020
D. Wang et al., "Ferroelectric Switching in Sub-20 nm Aluminum Scandium Nitride Thin Films," IEEE Electron Device Letters, vol. 41, no. 12, pp. 1774-1777, 2020.
C. Moe et al., "Highly Doped AlScN 3.5 GHz XBAW Resonators with 16% k2eff for 5G RF Filter Applications," in 2020 IEEE International Ultrasonics Symposium (IUS), 2020, pp. 1-4.
D. Wang et al., "Ferroelectric C-Axis Textured Aluminum Scandium Nitride Thin Films of 100 nm Thickness," in 2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF), 2020, pp. 1-4.
Z. Tang, M. D. Agati, and R. H. Olsson, "High Coupling Coefficient Resonance Mode in Al<inf>0.68</inf>Sc<inf>0.32</inf>N Surface Acoustic Wave Resonator with AlN Buffer Layer on a Silicon Substrate," in 2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF), 2020, pp. 1-3.
D. Wang et al., "Ferroelectric C-Axis Textured Aluminum Scandium Nitride Thin Films of 100 nm Thickness," in 2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF), 2020, pp. 1-4.